Investigation of ozone loss rate influenced by the surface material of a discharge chamber

Decay characteristics of ozone concentration in oxygen in a chamber with three types of wall material (stainless steel, copper, and aluminum) are measured using the 254 nm photoabsorption method. Effective lifetimes of ozone are estimated from decay curves of ozone concentration. These values depend on the wall material: They are largest for stainless steel and smallest for aluminum. The relationship between effective lifetime and gas pressure is investigated precisely to determine three values. The equivalent diffusion coefficient of ozone in oxygen and the reflection coefficient of ozone at the wall correspond to the loss rate of ozone at the wall. The collisional loss (quenching) rate coefficient of ozone in oxygen is also determined.