Electrokinetically driven active micro-mixers utilizing zeta potential variation induced by field effect

This paper presents a new electrokinetically driven active micro-mixer which uses localized capacitance effects to induce zeta potential variations along the surface of silica-based microchannels. The mixer is fabricated by etching bulk flow and shielding electrode channels into glass substrates and then depositing Au/Cr thin films within the latter to form capacitor electrodes, which establish localized zeta potential variations near the electrical double layer (EDL) region of the electroosmotic flow (EOF) within the microchannels. The potential variations induce flow velocity changes within a homogeneous fluid and a rapid mixing effect if an alternating electric field is provided. The current experimental data confirm that the fluid velocity can be actively controlled by using the capacitance effect of the buried shielding electrodes to vary the zeta potential along the channel walls. While compared with commonly used planar electrodes across the microchannels, the buried shielding electrodes prevent current leakage caused by bad bonding and allow direct optical observation during operation. It also shows that the buried shielding electrodes can significantly induce the field effect, resulting in higher variations of zeta potential. Computational fluid dynamic simulations are also used to study the fluid characteristics of the developed active mixers. The numerical and experimental results demonstrate that the developed microfluidic device pen-nits a high degree of control over the fluid flow and an efficient mixing effect. Moreover, the developed device could be used as a pumping device as well. The development of the active electrokinetically driven micro-mixer could be crucial for micro-total-analysis-systems.