期刊
APPLIED PHYSICS LETTERS
卷 102, 期 9, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.4794063
关键词
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资金
- Core Research for Evolutional Science and Technology
- Global COE Program Center of Excellence for Atomically Controlled Fabrication Technology
- Ministry of Education, Culture, Sports, Science and Technology
- [24651137]
- [23102504]
- Grants-in-Aid for Scientific Research [23102504] Funding Source: KAKEN
We demonstrate high-resolution and high-sensitivity x-ray phase-contrast imaging of a weakly scattering extended object by scanning coherent diffractive imaging, i.e., ptychography, using a focused x-ray beam with a spatial filter. We develop the x-ray illumination optics installed with the spatial filter to collect coherent diffraction patterns with a high signal-to-noise ratio. We quantitatively visualize the object with a slight phase shift (similar to lambda/320) at spatial resolution better than 17 nm in a field of view larger than similar to 2 x 2 mu m(2). The present coherent method has a marked potential for high-resolution and wide-field-of-view observation of weakly scattering objects such as biological soft tissues. (C) 2013 American Institute of Physics. [http://dx.doi.org/10.1063/1.4794063]
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