期刊
APPLIED PHYSICS LETTERS
卷 102, 期 6, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.4792062
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资金
- Department of Electronics & Information Technology (DeitY), Government of India through the Centre of Excellence in Nanoelectronics
- DAE-SRC Programme
- National Programme on Micro and Smart Systems (NPMASS), Government of India
In this work, an aluminium-doped zinc oxide (AZO) thin film transistor, embedded in a polymer micro-cantilever, is demonstrated for nano-mechanical sensing applications. This device senses the surface stress due to a change in the carrier mobility of the semi-conducting layer. Due to the low Young's modulus and high strain sensitivity of the AZO layer, this micro-cantilever shows a deflection sensitivity of 116 ppm per nanometer of deflection. Also, mechanical characterization of these devices shows that the resonance frequency is in the range of a few tens of kilohertz which is suitable for sensor applications. (C) 2013 American Institute of Physics. [http://dx.doi.org/10.1063/1.4792062]
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