期刊
APPLIED PHYSICS LETTERS
卷 102, 期 6, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.4792319
关键词
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资金
- National Basic Research Programs of China (973 Program) [2011CB301803, 2010CB327405, 2011CBA00608]
- National Natural Science Foundation of China [NSFC-61036011, 61107050, 61036010]
Based on a hybrid coupler composed of short-range surface plasmon polariton (SRSPP) and dielectric waveguides, an integrated sensor for ultra-thin layer sensing has been realized. The simulation and experiment results demonstrate that the thickness variation of detection layer (polymer layer) about several nanometers could be detected. The measured thickness-detection sensitivity is as high as 0.67 dB/nm. And the sensitive region for thickness variation of polymer layer can be adjusted widely by varying the thickness of the SRSPP waveguide. (C) 2013 American Institute of Physics. [http://dx.doi.org/10.1063/1.4792319]
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