期刊
APPLIED PHYSICS LETTERS
卷 100, 期 7, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.3684630
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资金
- NCCR Quantum Photonics
- Swiss National Science Foundation (SNSF) [200020-113542]
We report on the achievement of freestanding GaN photonic crystal L7 nanocavities with embedded InGaN/GaN quantum wells grown by metal organic vapor phase epitaxy on Si (111). GaN was patterned by e-beam lithography, using a SiO2 layer as a hard mask, and usual dry etching techniques. The membrane was released by underetching the Si (111) substrate. Micro-photoluminescence measurements performed at low temperature exhibit a quality factor as high as 5200 at similar to 420 nm, a value suitable to expand cavity quantum electrodynamics to the near UV and the visible range and to develop nanophotonic platforms for biofluorescence spectroscopy. (C) 2012 American Institute of Physics. [doi:10.1063/1.3684630]
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