4.6 Article

Automated markerless full field hard x-ray microscopic tomography at sub-50 nm 3-dimension spatial resolution

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APPLIED PHYSICS LETTERS
卷 100, 期 14, 页码 -

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AMER INST PHYSICS
DOI: 10.1063/1.3701579

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  1. Department of Energy, Office of Science, Office of Basic Energy Sciences
  2. U.S. Department of Energy, Office of Science, Office of Basic Energy Sciences [DE-AC02-98CH10886]

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A full field transmission x-ray microscope (TXM) has been developed and commissioned at the National Synchrotron Light Source at Brookhaven National Laboratory. The capabilities we developed in auto-tomography, local tomography, and spectroscopic imaging that overcome many of the limitations and difficulties in existing transmission x-ray microscopes are described and experimentally demonstrated. Sub-50 nm resolution in 3-dimension (3D) with markerless automated tomography has been achieved. These capabilities open up scientific opportunities in many research fields. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.3701579]

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