4.4 Article

Composite elastic magnet films with hard magnetic feature

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JOURNAL OF MICROMECHANICS AND MICROENGINEERING
卷 14, 期 10, 页码 1321-1327

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IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/14/10/005

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Hard magnetic materials with high remnant magnetic moment, M-r, have unique advantages that can achieve bi-directional (push-pull) movement in an external magnetic field. This paper presents the results on the fabrication and testing of novel composite elastic permanent magnet films. The microsize hard barium ferrite powder, NdFeB powder, and different silicone elastomers have been used to fabricate various large elongation hard magnetic films. Three different fabrication methods, screen-coating processing, moulding processing and squeegee-coating processing, have been investigated, and the squeegee-coating process was proven to be the most successful method. The uniform composite elastic permanent magnet films range from 40 Am to 216 Am in thickness have been successfully fabricated. These films were then magnetized in the thickness direction after fabrication. They exhibited permanent magnet behaviour; for instance, the film (0.640 mm(3) in volume) made of polydimethyl siloxane (PDMS) and hard barium ferrite powders is measured to give a coercive force, H,, of 3.24 x 10(5) A m(-1) and M-r of 1.023 x 10(-5) A m(2), and the film (0.504 mm(3) in volume) made of PDMS and NdFeB powders gives 1.55 x 10(5) A m(-1) H-c and 8.081 x 10(-5) A m(2) M-r. These composite elastic permanent magnet films' mechanical properties, like Young's modulus and deflection force, have been evaluated. To validate the films' Young's modulus, a finite-element computer simulation (ANSYS(R)) is used and one film is chosen whose Young's modulus (16.60 MPa) is confirmed by the simulation results with ANSYS(R). The large elongation composite elastic permanent magnet film provides an excellent diaphragm material, which plays an important role in the micropump or valve. The movement of the 126 Am thick film with 4.5 mm diameter made of PDMS and NdFeB powders has been tested in a 0.21 Tesla external magnetic field. It was proven to have large deflection of 125 mum.

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