期刊
APPLIED PHYSICS LETTERS
卷 85, 期 17, 页码 3789-3791出版社
AMER INST PHYSICS
DOI: 10.1063/1.1808498
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We report the deposition of single-phase undoped and Ca-doped CuInO2 thin films from a readily synthesized source target of Cu2In2O5-circumventing the very difficult fabrication of CuInO2 targets. X-ray diffraction shows that single-phase materials were obtained over a range of substrate temperatures and deposition pressures. p-type conductivities are measured to be similar to3x10(-3) S/cm, comparable to the best films previously reported. The optical properties of the films were measured by spectroscopic ellipsometry. (C) 2004 American Institute of Physics.
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