Enhanced optical constants of nanocrystalline yttrium oxide thin films

Yttrium oxide (Y(2)O(3)) films with an average crystallite-size (L) ranging from 5 to 40 nm were grown by sputter-deposition onto Si(100) substrates. The optical properties of grown Y(2)O(3) films were evaluated using spectroscopic ellipsometry measurements. The size-effects were significant on the optical constants and their dispersion profiles of Y(2)O(3) films. A significant enhancement in the index of refraction (n) is observed in well-defined Y(2)O(3) nanocrystalline films compared to that of amorphous Y(2)O(3). A direct, linear L-n relationship found for Y(2)O(3) films suggests that tuning optical properties for desired applications can be achieved by controlling the size at the nanoscale dimensions. (C) 2011 American Institute of Physics. [doi:10.1063/1.3524202]