期刊
APPLIED PHYSICS LETTERS
卷 98, 期 12, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.3568893
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资金
- Engineering and Physical Sciences Research Council (EPSRC) [EP/F023200]
- Research Councils U.K. (RCUK)
- Royal Academy of Engineering
We report the application of ambient spray pyrolysis for the deposition of high-k polycrystalline Y2O3 and amorphous Al2O3 dielectrics and their use in low-voltage ZnO thin-film transistors. The films are studied by means of atomic force microscopy, UV-visible absorption spectroscopy, impedance spectroscopy, and field-effect measurements. ZnO transistors based on spray pyrolysed Y2O3 and Al2O3 dielectrics show low leakage currents, and hysteresis-free operation with a maximum electron mobility of 34 cm(2)/V s and current on/off ratio on the order of 10(5). This work is a significant step toward high-performance oxide electronics manufactured using simple and scalable processing methods. (c) 2011 American Institute of Physics. [doi:10.1063/1.3568893]
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