4.6 Article

Room temperature picowatt-resolution calorimetry

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APPLIED PHYSICS LETTERS
卷 99, 期 4, 页码 -

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AMER INST PHYSICS
DOI: 10.1063/1.3617473

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  1. DOE, Office of Basic Energy Sciences, Division of Materials Sciences and Engineering [DE-SC0004871]
  2. AFOSR [FA9550-10-1-0528]
  3. NSF [CBET 1033542]
  4. Div Of Chem, Bioeng, Env, & Transp Sys
  5. Directorate For Engineering [1033542] Funding Source: National Science Foundation

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Picowatt-resolution calorimetry is necessary for fundamental studies of nanoscale energy transport. Here, we report a microfabricated device capable of <4 pW resolution-an order of magnitude improvement over state-of-the-art room temperature calorimeters. This is achieved by the incorporation of two important features. First, the active area of the device is thermally isolated by thin and long beams with a total thermal conductance (G) of similar to 600 nW/K. Further, a bimaterial cantilever thermometer capable of a temperature resolution (Delta T(res)) of similar to 4 mu K is integrated into the microdevice. The small thermal conductance and excellent temperature resolution enable measurements of heat currents (q = G x Delta T(res)) with a resolution <4 pW. (C) 2011 American Institute of Physics. [doi:10.1063/1.3617473]

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