期刊
APPLIED PHYSICS LETTERS
卷 98, 期 9, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.3559914
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资金
- Swedish Energy Agency
- Swedish Foundation for Strategic Research
- Swedish Research Council
- Knut and Alice Wallenberg Foundation
In unintentionally Si-doped AlN, the electron paramagnetic resonance (EPR) spectrum of the Si shallow donor (g=1.9905) was observed in darkness at room temperature. The temperature dependence of the EPR signal suggests that Si in AlN is a DX center with the DX- state lying at similar to 78 meV below the neutral shallow donor state. With such relatively small thermal activation energy, Si is expected to behave as a shallow dopant in AlN at normal device operating temperatures. (C) 2011 American Institute of Physics. [doi:10.1063/1.3559914]
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