期刊
APPLIED PHYSICS LETTERS
卷 99, 期 14, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.3645629
关键词
microfabrication; optical resonators; Q-factor; surface roughness; whispering gallery modes
资金
- Department of Homeland Security, Science and Technology Directorate [06-G-024]
- National Institutes of Health [2T32EB005582-06]
- National Science Foundation
- Directorate For Engineering [1128157] Funding Source: National Science Foundation
- Div Of Electrical, Commun & Cyber Sys [1128157] Funding Source: National Science Foundation
We describe the fabrication and preliminary optical characterization of rugged, Si-micromachined optofluidic ring resonator (mu OFRR) structures consisting of thin-walled SiO(x) cylinders with expanded midsections designed to enhance the three-dimensional confinement of whispering gallery modes (WGMs). These mu OFRR structures were grown thermally at wafer scale on the interior of Si molds defined by deep-reactive-ion etching and pre-treated to reduce surface roughness. Devices 85-mu m tall with 2-mu m thick walls and inner diameters ranging from 50 to 200 mu m supported pure-mode WGMs with Q-factors >10(4) near 985 nm. Advantages for eventual vapor detection in gas chromatographic microsystems are highlighted. (C) 2011 American Institute of Physics. [doi:10.1063/1.3645629]
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