期刊
DIAMOND AND RELATED MATERIALS
卷 13, 期 11-12, 页码 2100-2104出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.diamond.2004.06.021
关键词
nanodiamond; BEN; BEG; electron field emission
Effects of CH4/H-2 ratio and bias voltage of the microwave plasma-enhanced chemical vapor deposition (MPE-CVD) process on the nucleation behavior and associated characteristics of nanodiamonds were investigated. While the scanning electron microscopy (SEM) microstructure and Raman crystal structure of the films insignificantly vary with CH4/H-2 ratio and bias voltage, electron field emission properties of the materials markedly change with these deposition parameters. The predominating factor moditing the electron field emission properties of the nanodiamond films is presumed to be the increase in the proportion of sp(2)-bonded grain boundaries when the grain size of the nanodiamond films decreases. Between these two major factors, the bias voltage shows more prominent effects on modifying the granular structure of the nanodiamonds than the CH4/H-2 ratio does. The best electron field emission properties attainable are J(e)=500 muA/cm(2) at 20 V/mum and E-0=8.5 V/mum. (C) 2004 Elsevier B.V. All rights reserved.
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