Laser induced extraplanar propulsion for three-dimensional microfabrication

The laser induced extraplanar propulsion process is presented for the creation of controllable three-dimensional deformation of on-substrate components. It is demonstrated that the process is compatible with transparent substrates and ductile materials and is highly controllable in terms of the desired deformation via the adjustment of incident laser energy density. Copper films with thicknesses varying from 0.1-1 mu m are deformed over bending angles ranging from 0 degrees-180 degrees. A 355 nm laser at fluences ranging from 10-40 mJ/cm(2) is used in conjunction with an indium-tin-oxide propulsion layer to demonstrate the process. Characterization is performed via electron and laser confocal microscopy. (c) 2011 American Institute of Physics. [doi: 10.1063/1.3567763]