期刊
APPLIED PHYSICS LETTERS
卷 97, 期 7, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.3478213
关键词
annealing; carrier mobility; semiconductor growth; semiconductor materials; semiconductor thin films; sputter deposition; thin film transistors; tin compounds
资金
- Funding Program for World-Leading Innovative R&D on Science and Technology, Japan
Thin film transistors (TFTs) using polycrystalline tin oxides (SnO-SnO2) channels were formed on glass by a conventional sputtering method and subsequent annealing treatments. SnO-channel TFTs showed p-type operation with on/off current ratios of similar to 10(2) and field-effect mobilities of 0.24 cm(2) V-1 s(-1). Incorporation of excess oxygen to SnO channel layers did not generate holes but did electrons, which in turn led to n-type operation. This result is explained by transformation to a local SnO2-like structure and finally to SnO2. We propose a simple method to fabricate complimentary circuits by simultaneous selective formation of p- and n-channel TFTs. (C) 2010 American Institute of Physics. [doi:10.1063/1.3478213]
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