Ultrahigh-frequency nano-optomechanical resonators in slot waveguide ring cavities

We demonstrate integrated nano-optomechanical systems with driven flexural resonance up to 760 MHz in the ultrahigh frequency band. The mechanical element of the device is embedded in a slot waveguide racetrack optical resonator with an optical quality factor of 60 000. Displacement sensitivity of 0.45 X 10(-15) m/root Hz at 127 MHz is achieved in this circuit cavity configuration. (C)2010 American Institute of Physics. [doi: 10.1063/1.3513213]