期刊
APPLIED PHYSICS LETTERS
卷 96, 期 4, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.3293448
关键词
lenses; metallic thin films; nanofabrication; nanolithography; nanophotonics; optical fabrication; silver; soft lithography; surface roughness; wetting
资金
- Advanced Research Projects Agency [HR0011-05-3-0002]
- Office of Naval Research [N00173-07-G013]
- National Science Foundation [CMMI-0709023]
We demonstrate a smooth and low loss silver (Ag) optical superlens capable of resolving features at 1/12(th) of the illumination wavelength with high fidelity. This is made possible by utilizing state-of-the-art nanoimprint technology and intermediate wetting layer of germanium (Ge) for the growth of flat silver films with surface roughness at subnanometer scales. Our measurement of the resolved lines of 30 nm half-pitch shows a full-width at half-maximum better than 37 nm, in excellent agreement with theoretical predictions. The development of this unique optical superlens leads promise to parallel imaging and nanofabrication in a single snapshot.
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