期刊
APPLIED PHYSICS LETTERS
卷 96, 期 1, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.3284655
关键词
aluminium; elemental semiconductors; germanium; hafnium; lanthanum; metallic thin films; oxidation; passivation; surface chemistry; X-ray photoelectron spectra
资金
- EU [DUALLOGIC-214579]
The oxidation of a Ge surface by molecular oxygen in the presence of ultrathin La, Al, and Hf layers was examined by in situ x-ray photoelectron spectroscopy. Upon exposure to O-2, clean bare Ge and Hf-covered or Al-covered Ge surfaces show no Ge-O bond formation. On the contrary, a La-covered Ge surface strongly reacts with O-2 forming a stable germanate LaGeOx compound. This has a beneficial side effect for the interface because the formation of volatile GeO is suppressed, resulting in the good passivating properties of LaGeOx. The photoemission results are correlated with the oxygen density differences in the corresponding oxides.
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