期刊
APPLIED PHYSICS LETTERS
卷 96, 期 9, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.3304168
关键词
capacitors; gravimeters; inductors; microwave circuits; superconducting resonators
资金
- NIST
We have produced high-quality complex microwave circuits, such as multiplexed resonators and superconducting phase qubits, using a vacuum-gap technology that eliminates lossy dielectric materials. We have improved our design and fabrication strategy beyond our earlier work, leading to increased yield, enabling the realization of these complex circuits. We incorporate both novel vacuum-gap wiring crossovers for gradiometric inductors and vacuum-gap capacitors (VGC) on chip to produce resonant circuits that have large internal quality factors (30 000 < Q(I)< 165 000) at 50 mK, outperforming most dielectric-filled devices. Resonators with VGCs as large as 180 pF confirm single mode behavior of our lumped-element components.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据