期刊
APPLIED PHYSICS LETTERS
卷 96, 期 8, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.3308492
关键词
hafnium compounds; optical fabrication; optical interconnections; photonic crystals
资金
- DARPA
- New York State Foundation for Science, Technology, and Innovation
- National Science Foundation [ECCS-0622069, CHE-0641523]
We demonstrate digital tuning of the slow-light regime in silicon photonic-crystal waveguides by performing atomic layer deposition of hafnium oxide. The high group-index regime was deterministically controlled (redshift of 140 +/- 10 pm per atomic layer) without affecting the group-velocity dispersion and third-order dispersion. Additionally, differential tuning of 110 +/- 30 pm per monolayer of the slow-light TE-like and TM-like modes was observed. This passive postfabrication process has potential applications including the tuning of chip-scale optical interconnects, as well as Raman and parametric amplification.
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