期刊
APPLIED PHYSICS LETTERS
卷 96, 期 3, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.3293446
关键词
dielectric losses; permittivity; piezoelectric materials; piezoelectric thin films; piezoelectricity; sol-gel processing; spin coating; texture
资金
- Department of Science and Technology (DST, Govt. of India) [SR/S3/ME/041/2008]
- Council of Scientific and Industrial Research (CSIR, Govt. of India)
Pb(ZrxTi1-x)O-3 [PZT] thin films of thickness 2.0 mu m were fabricated on silicon substrates (111)Pt/Ti/SiO2/Si using a sol-gel spin-coating technique. PZT films on substrates with a strontium titanate bottom layer are preferentially {110}-oriented with a columnar structure. The PZT films exhibit good dielectric properties with a dielectric permittivity, epsilon(r)=1545 and dielectric loss, tan delta=0.04. Excellent piezoelectric characteristics are also exhibited by the {110}-oriented films with an average effective transverse piezocoefficient, e(31)(*) of -8.4 C/m(2). The influence of film texture and composition on the transverse piezocoefficient have also been studied.
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