期刊
APPLIED PHYSICS LETTERS
卷 96, 期 6, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.3310065
关键词
capacitors; high-k dielectric thin films; leakage currents; Monte Carlo methods; permittivity; Poole-Frenkel effect; titanium compounds; tunnelling; zirconium compounds
We report on a simulation algorithm, based on kinetic Monte Carlo techniques, that allows us to investigate transport through high-permittivity dielectrics. In the example of TiN/ZrO2/TiN capacitor structures, using best-estimate physical parameters, we have identified the dominant transport mechanisms. Comparison with experimental data reveals the transport to be dominated by Poole-Frenkel emission from donorlike trap states at low fields and trap-assisted tunneling at high fields.
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