期刊
APPLIED PHYSICS LETTERS
卷 96, 期 23, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.3424790
关键词
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资金
- Ministry of Education, Science, and Technology [R11-2005-048-00000-0]
- Ministry of Knowledge Economy, Korean Government [F0004061-2009-32]
- Korea Evaluation Institute of Industrial Technology (KEIT) [F0004060-2010-33] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
- National Research Foundation of Korea [2008-0060669] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
The evolution of native defect states near conduction band present in ZnO thin films is correlated with the bulk electron density and mobility changes driven by the thermal structure modification. The evolution of band edge electronic structures of ZnO thin films was studied via the spectroscopic detection of empty localized defect states in conduction band (CB) edge and occupied defect states in valence band using spectroscopic ellipsometry and x-ray photoemission spectroscopy. The energy depth of native defect states against CB edge revealed the direct correlation to Hall mobility values for ZnO thin films. (C) 2010 American Institute of Physics. [doi: 10.1063/1.3424790]
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