期刊
APPLIED PHYSICS LETTERS
卷 96, 期 4, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.3291670
关键词
gold; infrared spectra; nanoparticles; nanotechnology; plasma materials processing; plasmonics; sputter deposition; surface plasmon resonance; wetting
资金
- NanoCharM [NMP3-CA-2007-218570]
A two-step sputtering methodology for fabricating gold nanoparticles supported on silicon with tuneable surface plasmon resonance down to the near-infrared spectral range has been developed. This methodology uses modification of the wettability of Si surfaces by an intermediate O(2) plasma treatment to decouple diameter and height of nanoparticles as tuneable parameters to tailor the plasmon resonance.
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