Electrical thermo-optic tuning of ultrahigh-Q microtoroid resonators

The ability to tune resonant frequency in optical microcavities is an essential feature for many applications. Integration of electrical-based tuning as part of the fabrication process has been a key advantage of planar microresonant devices. Until recently, the combination of these features has not been available in devices that operate in the ultrahigh-Q regime where device quality factors (Q) can exceed 100 million. In this letter, we demonstrate an electrically tunable resonator on a chip with ultrahigh-quality factors. Futhermore, the devices have demonstrated tuning rates in excess of 85 GHz/V-2 and are capable of tuning more than 300 GHz. (C) 2004 American Institute of Physics.