期刊
APPLIED PHYSICS LETTERS
卷 94, 期 7, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.3081108
关键词
elemental semiconductors; high-speed optical techniques; image resolution; integrated circuits; optical focusing; optical microscopy; silicon
资金
- UK Engineering and Physical Sciences Research Council [EP/C509765/1]
- Engineering and Physical Sciences Research Council [EP/C509765/1] Funding Source: researchfish
We present experimental evidence for the resolution-enhancing effect of an annular pupil-plane aperture when performing nonlinear imaging in the vectorial-focusing regime through manipulation of the focal spot geometry. By acquiring two-photon optical beam-induced current images of a silicon integrated-circuit using solid-immersion-lens microscopy at 1550 nm we achieved 70 nm resolution. This result demonstrates a reduction in the minimum effective focal spot diameter of 36%. In addition, the annular-aperture-induced extension of the depth-of-focus causes an observable decrease in the depth contrast of the resulting image and we explain the origins of this using a simulation of the imaging process.
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