期刊
APPLIED PHYSICS LETTERS
卷 95, 期 13, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.3238466
关键词
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资金
- Engineering and Physical Sciences Research Council (EPSRC) [EP/F023200, EP/C539516]
- Research Councils U. K. (RCUK)
- Lee-Lucas endowment
We report the application of spray pyrolysis (SP) for the deposition of high quality zinc oxide (ZnO) films and the fabrication of thin-film transistors. The chemical, structural, optical, and electronic properties of as-deposited ZnO films are studied using infrared spectroscopy, atomic force microscopy, UV-visible spectroscopic ellipsometry, and field-effect measurements. SP ZnO films are found to be uniform and polycrystalline with a band gap of 3.32 eV. ZnO transistors exhibit n-channel characteristics with electron mobility in the range 10-22 cm(2)/Vs. Device performance is found to depend on the work function of source/drain metal electrodes and on the device architecture employed. (C) 2009 American Institute of Physics. [doi: 10.1063/1.3238466]
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