期刊
APPLIED PHYSICS LETTERS
卷 95, 期 26, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.3255016
关键词
carbon nanotubes; chromium; contact resistance; electrodes; gold; interconnections; iron; palladium; platinum; titanium; wetting; work function
资金
- Ministry of Science and Technology (MOST) through the CNNC
- KETI [10029846-2007-01]
- Air Force Office of Scientific Research (AFOSR)-MOST
- National Research Foundation of Korea [2007-00202] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
The contact resistance of 14 different electrode metals with the work function between 3.9 and 5.7 eV has been investigated for carbon nanotube (CNT) interconnects. We observed that the contact resistance was mainly influenced by the two following parameters: the wettability and the work function difference of electrode metal to CNT. Ti, Cr, and Fe with good wettability showed lower resistance than other metals. Furthermore, no dependence of the contact resistance on the work function difference has been observed. However, the contact resistance of Au, Pd, and Pt with poor wettability increased as the work function difference became larger.
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