Tunneling magnetoresistance sensors for high resolutive particle detection

Arrays of tunnel magnetoresistance sensors based on MgO as insulating layer are employed to detect magnetic microbeads. For single bead detection, elliptically shaped sensors of axis lengths of 400 and 100 nm are used. Due to high shape anisotropy a linear response of the sensor signal in a magnetic field range between -500 and 500 Oe can be reported. By performing static detection measurements of magnetic microbeads, a distinct signal shape correlated with the position of beads in respect to the sensor can be observed. The experimental data are compared to micromagnetic simulations carried out on a trilayer model.