Ultraviolet photodetectors based on selectively grown ZnO nanorod arrays

Metal-semiconductor-metal (MSM) ultraviolet (UV) photodetectors with ZnO nanorods (NRs) have been fabricated and characterized in this investigation. The NR arrays were selectively grown on the gap of interdigitated electrodes by chemical solution method through a photolithography process. Compared to a traditional ZnO MSM photodetector with no NRs, the fabricated NR UV photodetector showed much higher photoresponsity. As a result, it can be attributed to high surface-to-volume ratio of ZnO NRs and such a high photoresponse could strongly depend on oxygen adsorption/desorption process in the presence of trap states at the NR surface.