期刊
APPLIED PHYSICS LETTERS
卷 94, 期 10, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.3100775
关键词
diffraction gratings; elemental semiconductors; finite difference time-domain analysis; II-VI semiconductors; phononic crystals; semiconductor devices; silicon; surface acoustic wave devices; wide band gap semiconductors; zinc compounds
资金
- National Science Council, ROC (NSC) [96-2221-E-002-206-MY3]
In this paper, a design that combines two-port surface acoustic wave (SAW) devices and phononic crystals (PCs) acting as reflected gratings is demonstrated. Finite-difference time-domain method is used to analyze SAWs encountering the PC and optimize the design. A layered ZnO/Si SAW device and a square lattice PC composing of cylindrical holes on silicon were fabricated. With the PC of 15-layer cylinders, experimental insertion loss shows a 7 dB improvement at 212 MHz at central frequency. In addition, the size of gratings is reduced significantly as compared to the traditional gratings with hundreds of metal strips.
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