期刊
APPLIED PHYSICS LETTERS
卷 95, 期 2, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.3182801
关键词
band-pass filters; cavity resonators; elemental semiconductors; integrated optics; membranes; nanostructured materials; optical films; optical filters; photoemission; red shift; reflectivity; silicon; silicon compounds
资金
- U.S. AFOSR [FA9550-08-1-0337]
- U.S. DARPA [HR0011-08-1-0058]
We report here broadband membrane reflectors based on Fano resonances in patterned silicon nanomembranes. Resonance control of the reflectors was realized either by partially removing buried oxide layer underneath the device layer or by controlled SiO2 film deposition on top of the devices. Both blueshifts and redshifts were demonstrated with a turning range of 50 nm for a center wavelength of 1550 nm. These results demonstrate practical postprocess means for Fano resonance engineering for both narrowband filters and ultracompact broadband reflectors.
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