期刊
APPLIED PHYSICS LETTERS
卷 94, 期 14, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.3117222
关键词
copper compounds; electrodes; electron relaxation time; ellipsometry; gallium compounds; grain size; high-pressure effects; indium compounds; metallic thin films; molybdenum; nucleation; solar cells; sputter deposition; ternary semiconductors; voids (solid)
资金
- AFRL [FA9453-08-C-0172]
- Vehicles Directorate, Kirtland AFB
Real-time spectroscopic ellipsometry (RTSE) is shown to be an effective contactless probe of radio frequency magnetron sputtered molybdenum thin films used as the back electrode in chalcopyrite [Cu(In,Ga)Se(2)] solar cells. A series of Mo thin films was sputtered onto soda-lime glass substrates at Ar pressures ranging from 4 to 20 mTorr. RTSE measurements reveal how Ar pressure affects the nucleation and growth mechanisms that influence the films' ultimate grain structure and properties. Determinations of the free electron relaxation times at optical frequencies reveal that higher pressures lead to a smaller average grain size and increased void volume fraction.
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