期刊
APPLIED PHYSICS LETTERS
卷 94, 期 15, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.3119316
关键词
argon; plasma collision processes; plasma diagnostics; plasma temperature
资金
- National Natural Science Foundation of China [10775087]
The characteristics of the electron energy in a microwave atmospheric-pressure argon microplasma are investigated by a spatially resolved optical emission spectroscopy. By adding tiny amount of xenon (< 1 ppm) as tracer gas into the argon discharge, it is found that the spatial distribution of the electrons with energy >8.3 eV is quite different from that of the electrons with energy >11.5 eV. Spatial distribution of the population ratio between 4p and 5p levels of Ar atom is also determined. Furthermore, with a collisional-radiative model, it is found that the spatial variation of this population ratio is mainly attributed to the spatial nonuniformity of the effective electron temperature.
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