4.6 Article

Growth rate enhancement by nitrogen in diamond chemical vapor deposition-a catalytic effect

期刊

APPLIED PHYSICS LETTERS
卷 94, 期 22, 页码 -

出版社

AMER INST PHYSICS
DOI: 10.1063/1.3143631

关键词

catalysis; chemical vapour deposition; crystal growth from vapour; diamond; nitrogen

向作者/读者索取更多资源

The diamond growth rate enhancement factor A([N-2],[CH4]) of nitrogen has been measured in situ by laser reflection interferometry using thin reflecting iridium interlayers on on-axis and off-axis single crystals. A shows a characteristic linear decrease with the methyl radical concentration in the gas phase. The resulting local maximum in the growth rate curve yields conditions for which growth is accelerated when the methane concentration is decreased. In a model that fits the measurements quantitatively nitrogen catalyzes growth and competes with the hydrocarbon growth species for adsorption sites. The data allow excluding of several alternative models for nitrogen induced growth rate enhancement.

作者

我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。

评论

主要评分

4.6
评分不足

次要评分

新颖性
-
重要性
-
科学严谨性
-
评价这篇论文

推荐

暂无数据
暂无数据