Hybrid replication development for construction of polymeric devices

The combination of poly(dimethyl)siloxane (PDMS) replica molding, hot-embossing of poly(methyl)methacrylate (PPMA) and PDMS membrane transfer has been explored for the construction of a pneumatically-actuated, multi-levelled polymeric microvalve. The critical part of the process, bonding of the three polymeric levels, has been demonstrated. It involves bonding of PDMS to PDMS using two different methods, one with oxygen plasma treatment and heat treatment, and the other one with PDMS as glue, whereas PDMS was bonded to PMMA using a commercial primer. A method for replicating PDMS parts in large number was also described.