期刊
APPLIED PHYSICS LETTERS
卷 95, 期 13, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.3237169
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资金
- Korea government (MEST) [2009-0080344]
- SILVACO
- IC Design Education Center (IDEC)
Bipolar ac stress-induced instability of amorphous indium-gallium-zinc oxide (a-IGZO) thin-film transistors is comparatively investigated with that under a positive dc gate bias stress. While the positive dc gate bias stress-induced threshold voltage shift (Delta V-T) is caused by the charge trapping into the interface/gate dielectric as reported in previous works, the dominant mechanism of the ac stress-induced Delta V-T is observed to be due to the increase in the acceptorlike deep states of the density of states (DOS) in the a-IGZO active layer. Furthermore, it is found that the variation of deep states in the DOS makes a parallel shift in the I-DS-V-GS curve with an insignificant change in the subthreshold slope, as well as the deformation of the C-G-V-G curves. (C) 2009 American Institute of Physics. [doi:10.1063/1.3237169]
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