Time-dependent gas phase kinetics in a hydrogen diluted silane plasma

The gas phase kinetics in a high-pressure hydrogen diluted silane plasma has been studied at time scales of 10(-2)-6x10(2) s. The time-resolved gas phase composition shows the following kinetics at different time scales: silane decomposition and polysilane generation in less than or similar to 2x10(-1) s, nanoparticle formation and plasma density reduction in 10(-1)-10(0) s, polysilane accumulation in 10(0)-10(2) s, and silane depletion and electrode heating in greater than or similar to 10(1) s. Disilane radicals are implied to be the dominant film precursors in addition to silyl radicals.