期刊
APPLIED PHYSICS LETTERS
卷 93, 期 8, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.2969409
关键词
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资金
- NSF-DMR [0644835]
- Center for Integrated Nanotechnologies at Los Alamos National Laboratory
We report on the synthesis of epitaxial (single-crystal-like), nanotwinned Cu films via magnetron sputtering. Increasing the deposition rate from 1 to 4 nm/s decreased the average twin lamellae spacing from 16 to 7 nm. These epitaxial nanotwinned Cu films exhibit significantly higher ratio of hardness to room temperature electrical resistivity than columnar grain (nanocrystalline), textured, nanotwinned Cu films. (C) 2008 American Institute of Physics.
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