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Measurement of electron temperature and density in an argon microdischarge by laser Thomson scattering

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APPLIED PHYSICS LETTERS
卷 92, 期 22, 页码 -

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AMER INST PHYSICS
DOI: 10.1063/1.2939437

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Laser Thomson scattering in a novel, backscattered configuration was employed to measure the electron temperature (T(e)) and electron density (n(e)) in argon dc microdischarges, with an interelectrode gap of 600 mu m. Measurements were performed at the center of the gap that corresponds to the positive column. For 50 mA microdischarge current and over the pressure range of 300-700 Torr, the plasma parameters were found to be T(e)=0.9 +/- 0.3 eV and n(e)=(6 +/- 3)x10(13) cm(-3), in reasonable agreement with the predictions of a mathematical model. (C) 2008 American Institute of Physics.

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