Characterization of nanomechanical and nanotribological properties of digital micromirror devices

Digital micromirror devices (DMDs) are commercially used for digital projection displays. Adhesion/stiction due to contact between the spring tips and landing sites is a critical issue that affects the reliable operation of DMDs. In this study, an atomic force microscopy (AFM) methodology was used to perform nanoscale bending tests on the hinge of the DMD to measure the elastic modulus which is a very important factor in its design. Micromirror tilting measurements on the DMD chip were performed to obtain the force required to tilt the micromirror. In addition, the adhesive force of the landing sites, and the surface roughness, adhesive force and coefficient of friction of various films, were measured. These data were used to understand the relationship between the interface material properties and propensity for micromirror stiction occurrence in various DMDs.