期刊
APPLIED PHYSICS LETTERS
卷 85, 期 24, 页码 6051-6053出版社
AMER INST PHYSICS
DOI: 10.1063/1.1835553
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Electrical connections through microfabricated suspensions on a pneumatically pumped elastomer membrane were demonstrated. A method to fabricate the suspensions on the elastomer membrane was developed. The elastomer membrane was 1 mm in diameter and 120 mum in thickness. Resistances of the microfabricated suspensions measured across the elastomer membrane were within 1% difference when the membrane's center deflection ranged from 0 to 100 mum, which corresponded to a numerical aperture change from 0 to 0.2 as well as a 2.6% elongation of the elastomer. (C) 2004 American Institute of Physics.
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