期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 117, 期 2, 页码 325-330出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2004.06.029
关键词
microvalve and array; hydraulic actuator; electroforming; large flow rate; high frequency; high pressure
A robust passive high frequency high pressure micro check valve was developed for piezoelectrically actuated pumps. A novel cross-patterned microvalve flap is used to increase the valve's structural stiffness with pressures up to 10 MPa. A mechanical valve stopper prevents valve-flap failure under extreme high pressure. The valve-flap is also designed to work at frequency larger than 10,000 Hz. The valve-flap was fabricated with electroformed nickel on silicon substrate. Deep RIE etching was used to fabricate the valve channels in the silicon substrate. The whole valve weighs 0.2 g including packaging. The microvalve flow rate (water) is measured to be 18 cm(3)/s under a pressure difference of 50 psi. The microvalve was integrated with a compact piezoelectric pump and produced pressure of 350 psi when operated at 10 kHz frequency. (C) 2004 Elsevier B.V. All rights reserved.
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