Study of normal incidence of three-component multilayer mirrors in the range 20-40 nm

We study theoretically and experimentally the increase of normal incidence reflectivity generated by addition of a third material in the period of a standard periodic multilayer, for wavelengths in the range 20 to 40 nm. The nature and thickness of the three materials has been optimized to provide the best enhancement of reflectivity. Theoretical reflectivity of an optimized B4C/Mo/Si multilayer reaches 42% at 32 nm. B4C/MO/Si multilayers have been deposited with a magnetron sputtering system and a refiectivity of 34% at 32 nm has been measured on a synchrotron radiation source. (C) 2005 Optical Society of America.