Enhanced Carrier Transport in Uniaxially (001)-Oriented Anatase Ti0.94Nb0.06O2 Films Grown on Nanosheet Seed Layers

Uniaxially (001)-oriented anatase Ti0.94Nb0.06O2 films were sputtered on a seed layer of glass covered with Ca2Nb3O10 nanosheets (CNO-NS). The films had an effective electron mass of 0.7m(0) (m(0) denotes the free electron mass), which was smaller than that of randomly oriented films, i.e., 0.9m(0). The as-grown films exhibited a low resistivity of 7.6 x 10(-4) Omega cm. Postdeposition annealing under H-2 atmosphere further reduced the resistivity to 4.0 x 10(-4) Omega cm. This value is comparable with that of conventional transparent conducting oxides. Results indicate that sputtering using CNO-NS is promising for the fabrication of highly conductive Ti1-xNbxO2 electrodes on glass. (C) 2011 The Japan Society of Applied Physics