Fabrication of Highly Crystalline Corundum-Structured α-(Ga1-xFex)2O3 Alloy Thin Films on Sapphire Substrates

Highly crystalline corundum-structured alpha-(Ga1-xFex)(2)O-3 alloy thin films were fabricated on c-plane sapphire substrates by using a mist chemical vapor deposition method. The full-widths at half maximum of X-ray diffraction rocking curves were smaller than 100 arcsec for the entire range of x from 0 to 1. Optical band gaps were artificially tuned to a value between those of alpha-Ga2O3 and alpha-Fe2O3, that is, 2.2 and 5.3 eV with changing the Fe content x in the films. Magnetic measurements revealed ferromagnetic properties of a alpha-(Ga1-xFex)(2)O-3 (x=0.24) thin film at 110 K. (C) 2009 The Japan Society of Applied Physics