期刊
APPLIED PHYSICS EXPRESS
卷 2, 期 1, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1143/APEX.2.015004
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资金
- Solution Oriented Research for Science and Technology (SORST)
- Japan Science and Technology Agency (JST)
- Japan Society for the Promotion of Science (JSPS)
A well position-controllable single Ge nanowire array was grown on patterned Au catalysts substrate by low-pressure chemical vapor deposition. Both transmission electron microscope and X-ray diffraction results indicate that Ge nanowires are single crystalline with diamond structure. By optimizing the electron-beam lithography process, Au patterns with a diameter of 10 nm were prepared by lift-off method. The growth of Ge nanowires can be precisely controlled by adjusting the location of catalysts, which may offer the possibility of in situ fabrication of nanowire devices. (C) 2009 The Japan Society of Applied Physics
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