期刊
MICROELECTRONIC ENGINEERING
卷 77, 期 2, 页码 168-174出版社
ELSEVIER
DOI: 10.1016/j.mee.2004.10.004
关键词
thermal curing nano-imprinting lithography; zero residual layer; thermal curing resin; self-assembled monolayer; pressurized chamber type imprinting system; high fidelity pattern transfer
Nano-imprinting lithography is one of the most promising key technologies for mass production of devices with nano-sized patterns. It is regarded as a tool for the next generation lithography (NGL). In this study, a thermally cut-able monomer solution was used for the imprinting process in order to lower imprinting pressure and temperature. A unique pressure vessel type imprinting system was used to imprint patterns as small as 150 nm over a whole 6 in. diameter wafer at a relatively low temperature (80 degreesC) and pressure (20 atm). Near zero residual layer under the trenches was successfully demonstrated over the whole 6 in. active area. (C) 2004 Elsevier B.V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据